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%0 Conference Paper
%1 conf/icicdt/WeinreichSPRWTN14
%A Weinreich, Wenke
%A Seidel, Konrad
%A Polakowski, Patrick
%A Riedel, Stefan
%A Wilde, Lutz
%A Triyoso, Dina H.
%A Nolan, Mark G.
%B ICICDT
%D 2014
%I IEEE
%K dblp
%P 1-4
%T ALD ZrO2 processes for BEoL device applications.
%U http://dblp.uni-trier.de/db/conf/icicdt/icicdt2014.html#WeinreichSPRWTN14
%@ 978-1-4799-2153-9
@inproceedings{conf/icicdt/WeinreichSPRWTN14,
added-at = {2023-09-30T00:00:00.000+0200},
author = {Weinreich, Wenke and Seidel, Konrad and Polakowski, Patrick and Riedel, Stefan and Wilde, Lutz and Triyoso, Dina H. and Nolan, Mark G.},
biburl = {https://www.bibsonomy.org/bibtex/2d28c3d08b30fd5d8de06a1729adf5543/dblp},
booktitle = {ICICDT},
crossref = {conf/icicdt/2014},
ee = {https://doi.org/10.1109/ICICDT.2014.6838604},
interhash = {6e55e7b46ede609345cca21c2f36b698},
intrahash = {d28c3d08b30fd5d8de06a1729adf5543},
isbn = {978-1-4799-2153-9},
keywords = {dblp},
pages = {1-4},
publisher = {IEEE},
timestamp = {2024-04-10T21:06:03.000+0200},
title = {ALD ZrO2 processes for BEoL device applications.},
url = {http://dblp.uni-trier.de/db/conf/icicdt/icicdt2014.html#WeinreichSPRWTN14},
year = 2014
}