%0 Conference Paper %1 conf/icicdt/WeinreichSPRWTN14 %A Weinreich, Wenke %A Seidel, Konrad %A Polakowski, Patrick %A Riedel, Stefan %A Wilde, Lutz %A Triyoso, Dina H. %A Nolan, Mark G. %B ICICDT %D 2014 %I IEEE %K dblp %P 1-4 %T ALD ZrO2 processes for BEoL device applications. %U http://dblp.uni-trier.de/db/conf/icicdt/icicdt2014.html#WeinreichSPRWTN14 %@ 978-1-4799-2153-9

@inproceedings{conf/icicdt/WeinreichSPRWTN14, added-at = {2023-09-30T00:00:00.000+0200}, author = {Weinreich, Wenke and Seidel, Konrad and Polakowski, Patrick and Riedel, Stefan and Wilde, Lutz and Triyoso, Dina H. and Nolan, Mark G.}, biburl = {https://www.bibsonomy.org/bibtex/2d28c3d08b30fd5d8de06a1729adf5543/dblp}, booktitle = {ICICDT}, crossref = {conf/icicdt/2014}, ee = {https://doi.org/10.1109/ICICDT.2014.6838604}, interhash = {6e55e7b46ede609345cca21c2f36b698}, intrahash = {d28c3d08b30fd5d8de06a1729adf5543}, isbn = {978-1-4799-2153-9}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-10T21:06:03.000+0200}, title = {ALD ZrO2 processes for BEoL device applications.}, url = {http://dblp.uni-trier.de/db/conf/icicdt/icicdt2014.html#WeinreichSPRWTN14}, year = 2014 }