%0 Conference Paper %1 conf/irps/RheeKPUHCKRC23 %A Rhee, SungMan %A Kim, Hyunjin %A Park, Sangku %A Uemura, Taiki %A Hwang, Yuchul %A Choo, Seungjin %A Kim, Jinju %A Rhee, Hwasung %A Chung, Shin-Young %B IRPS %D 2023 %I IEEE %K dblp %P 1-4 %T Machine Learning Based V-ramp VBD Predictive Model Using OCD-measured Fab Parameters for Early Detection of MOL Reliability Risk. %U http://dblp.uni-trier.de/db/conf/irps/irps2023.html#RheeKPUHCKRC23 %@ 978-1-6654-5672-2

@inproceedings{conf/irps/RheeKPUHCKRC23, added-at = {2023-05-24T00:00:00.000+0200}, author = {Rhee, SungMan and Kim, Hyunjin and Park, Sangku and Uemura, Taiki and Hwang, Yuchul and Choo, Seungjin and Kim, Jinju and Rhee, Hwasung and Chung, Shin-Young}, biburl = {https://www.bibsonomy.org/bibtex/24979e98dfd6ff63f724dc23e706d0273/dblp}, booktitle = {IRPS}, crossref = {conf/irps/2023}, ee = {https://doi.org/10.1109/IRPS48203.2023.10117962}, interhash = {b95c932a07202b461dbdfc517165c155}, intrahash = {4979e98dfd6ff63f724dc23e706d0273}, isbn = {978-1-6654-5672-2}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-09T12:18:52.000+0200}, title = {Machine Learning Based V-ramp VBD Predictive Model Using OCD-measured Fab Parameters for Early Detection of MOL Reliability Risk.}, url = {http://dblp.uni-trier.de/db/conf/irps/irps2023.html#RheeKPUHCKRC23}, year = 2023 }