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A novel method to measure the sidewall angle of MEMS structures.

, , , , and . IEEE SENSORS, page 1-3. IEEE, (2017)

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Non-local neural networks combined with local importance-based pooling for space-time video super-resolution., , , and . IET Image Process., 17 (4): 1097-1110 (March 2023)Evaluation of Au/a-Si eutectic wafer level bonding process., , , , and . NEMS, page 560-563. IEEE, (2014)Investigation of reliability of MEMS gyroscopes under different shock conditions., , , , , , and . NEMS, page 441-444. IEEE, (2015)Deep Reinforcement Learning Algorithm for Permutation Flow Shop Scheduling Problem., , , and . ICIC (3), volume 13395 of Lecture Notes in Computer Science, page 473-483. Springer, (2022)A Hyper-Heuristic Algorithm with Q-Learning for Distributed Permutation FlowshopScheduling Problem., , , , and . ICIC (1), volume 14086 of Lecture Notes in Computer Science, page 122-131. Springer, (2023)Hazy Re-ID: An Interference Suppression Model for Domain Adaptation Person Re-Identification Under Inclement Weather Condition., , , , and . ICME, page 1-6. IEEE, (2021)Parameter characterization of anodic bonded electrical interconnect in MEMS/NEMS devices., and . NEMS, page 198-201. IEEE Computer Society, (2009)Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer., , , , , and . NEMS, page 1036-1039. IEEE, (2010)Fabrication and testing of a novel silicon probe for micromachined surface profilers., , , , and . NEMS, page 406-409. IEEE, (2011)A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer., , , , , , and . NEMS, page 421-425. IEEE, (2015)