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A novel piezoresistive sensitive structure for micromachined high-pressure sensors.

, , , , , , , , and . NEMS, page 728-731. IEEE, (2017)

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A Through-Hole Capacitive Micromachined Ultrasonic Transdcuer with High Perfromance., , , , , , , , , and . NEMS, page 181-186. IEEE, (2019)A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on Dry-wet Combination Etching Process., , , , , , , , and . NEMS, page 167-170. IEEE, (2020)Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System., , , , , and . NEMS, page 216-220. IEEE, (2018)A Novel Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on Parametric Excitation Method., , , , , and . NEMS, page 240-244. IEEE, (2018)Coupled Piezoelectric Micromachined Ultrasonic Transducers Array with High Ultrasonic Emission Performance., , , , , , , and . NEMS, page 151-154. IEEE, (2018)Analysis of the 3ω method for the measurement of fluid thermal properties., , , , , and . NEMS, page 196-199. IEEE, (2016)A novel piezoresistive sensitive structure for micromachined high-pressure sensors., , , , , , , , and . NEMS, page 728-731. IEEE, (2017)Bandwidth Extension Technique of Piezoelectric Micromachined Ultrasonic Transducers for Air Coupled Applications., , and . IEEE SENSORS, page 1-4. IEEE, (2021)Smith Matching for CMUTs-based Biochemical Resonant Sensor., , , , , , , , , and . NEMS, page 312-316. IEEE, (2019)