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Capacitive micromachined ultrasonic transducer for ultra-low pressure detection.

, , , , and . NEMS, page 600-603. IEEE, (2014)

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A Through-Hole Capacitive Micromachined Ultrasonic Transdcuer with High Perfromance., , , , , , , , , and . NEMS, page 181-186. IEEE, (2019)A Novel Resonator Based on In-plane Mode for Fluid Density and Viscosity Measurements., , , , , and . NEMS, page 172-175. IEEE, (2019)Effect of Oxidation on Conductivity Characteristics of Tungsten-Rhenium Thin-Film Thermocouples Sensor., , , , , , and . NEMS, page 114-117. IEEE, (2019)A Wearable Strain Sensor Based on Fiber-structured PU/MXene/CNT Composite with Ultra-high Sensitivity and Broad Sensing Range., , , , , , and . NEMS, page 1362-1365. IEEE, (2021)Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer., , and . IEEE SENSORS, page 1-4. IEEE, (2018)Equivalent Circuit Analysis of CMUTs-based Device for Measurement in Liquid Samples., , , , , and . MeMeA, page 1-5. IEEE, (2021)The Design and Fabrication of Implanted Intracranial Pressure Sensor., , and . BIODEVICES, page 296-299. INSTICC Press, (2009)Optical Fiber MEMS Micro Pressure Sensor Based On Beam-membrane Structure., , , , , , and . NEMS, page 135-138. IEEE, (2019)Smith Matching for CMUTs-based Biochemical Resonant Sensor., , , , , , , , , and . NEMS, page 312-316. IEEE, (2019)Characterization of line edge roughness and line width roughness of nano-scale typical structures., , , , and . NEMS, page 299-303. IEEE Computer Society, (2009)