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Paper generators: harvesting energy from touching, rubbing and sliding., , , and . UIST, page 23-30. ACM, (2013)Design of a modular tactile sensor and actuator based on an electrorheological gel., , and . ICRA, page 13-17. IEEE, (1996)Ultra-compliant neural probes are subject to fluid forces during dissolution of polymer delivery vehicles., , , , , , , and . EMBC, page 1550-1553. IEEE, (2013)Technologies for Cofabricating MEMS and Electronics., , , and . Proc. IEEE, 96 (2): 306-322 (2008)Elastic ribbon-like piezoelectric energy harvester for wearable devices with stretchable surfaces., and . EMBC, page 4816-4819. IEEE, (2016)Ultra-low power frequency and duty-cycle modulated implantable pressure-temperature sensor., , , , , and . BioCAS, page 226-229. IEEE, (2013)A low-noise low-offset capacitive sensing amplifier for a 50-μg√Hz monolithic CMOS MEMS accelerometer., , and . IEEE J. Solid State Circuits, 39 (5): 722-730 (2004)Electrostatic latching for inter-module adhesion, power transfer, and communication in modular robots., , , , , and . IROS, page 2779-2786. IEEE, (2007)High-g Capacitive Accelerometer Arrays with Low Bias Instability., , , , , , , and . PLANS, page 9-15. IEEE, (2020)Statistical design and optimization for adaptive post-silicon tuning of MEMS filters., , , , , , , and . DAC, page 176-181. ACM, (2012)