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Improvement on sheet resistance uniformity of nickel silicide by optimization of silicidation conditions.

, , , , , , , , and . Microelectron. Reliab., 53 (5): 665-669 (2013)

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Improvement on sheet resistance uniformity of nickel silicide by optimization of silicidation conditions., , , , , , , , and . Microelectron. Reliab., 53 (5): 665-669 (2013)On a randomized strategy in Neveu's stopping problem. Stochastic Processes and their Applications, 21 (1): 159--166 (December 1985)Squeezed States in a Bose-Einstein Condensate, , , , and . Science, 291 (5512): 2386--2389 (Mar 23, 2001)The approximate linear response theory and its mathmatical structures, and . Abstract Book of the XXIII IUPAP International Conference on Statistical Physics, Genova, Italy, (9-13 July 2007)Formation of high resistivity phases of nickel silicide at small area., , , , , , , , , and . Microelectron. Reliab., 53 (5): 659-664 (2013)