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A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation.

, , , and . IEEE Trans. Syst. Man Cybern. Syst., 45 (5): 805-818 (2015)

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An eM-Plant-based virtual single-arm cluster tool., and . ICNSC, page 40-45. IEEE, (2012)Scheduling of single-arm cluster tools with multi-type wafers and shared PMs., , , and . CASE, page 1046-1051. IEEE, (2017)TSDRL: A three-stage deep reinforcement learning method for reliable collaboration of manufacturing service towards mass personalized production., , , , , , and . Expert Syst. Appl., (2024)Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review., , , and . ICNSC, page 271-276. IEEE, (2015)Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges., , , and . IEEE Trans Autom. Sci. Eng., 15 (2): 586-601 (2018)Design Optimization of Support Structures Based on Numerical Simulation of the Temperature Fields in Selective Laser Melting., , and . ICNSC, page 1-5. IEEE, (2021)Parallel Petri Nets Modeling Method Of Manufacturing System Based On The improved PDDL., , , , and . ICNSC, page 1-6. IEEE, (2022)Noise Reduction Study of Signal Detection in Hall Sensors by Modal Analysis., , , , and . ICNSC, page 1-6. IEEE, (2022)Cycle time analysis for cluster tools with parallel process chambers, processing time variation, and chamber cleaning operations., , , , and . Expert Syst. Appl., (2024)Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools., , , , , and . IEEE Trans Autom. Sci. Eng., 18 (4): 1653-1667 (2021)