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CMOS integrated MEMS resonator for RF applications.

, , , , , , , , и . ISCAS, IEEE, (2006)

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A read-out strategy and circuit design for high frequency MEMS resonators., , , , , и . ISCAS (6), стр. 5361-5364. IEEE, (2005)Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth., , , и . Sensors, 21 (14): 4786 (2021)Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction., , , , и . Sensors, 15 (7): 17036-17047 (2015)A low noise CMOS amplifier for ENG signals., , , и . ISCAS (4), стр. 21-24. IEEE, (2004)Design of a Fully Integrated CMOS-PMUT System., , , и . DCIS, стр. 1-5. IEEE, (2018)Design of self-sustained CMOS amplifiers for all-CMOS MEMS based oscillators., , , , и . ICECS, стр. 752-755. IEEE, (2016)Mixing in a 220MHz CMOS-MEMS., , , , , , , , и . ISCAS, стр. 2630-2633. IEEE, (2007)CMOS integrated MEMS resonator for RF applications., , , , , , , , и . ISCAS, IEEE, (2006)Fully Integrated CMOS-PMUT Transceiver., , , и . ICECS, стр. 149-152. IEEE, (2018)Instantaneous de-embedding of the on-wafer equivalent-circuit parameters of acoustic resonator (FBAR) for integrated circuit applications., , , , , и . SBCCI, стр. 212-217. ACM, (2007)