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A high sensitivity micromachined accelerometer with an enhanced inertial mass SOI MEMS process., , и . NEMS, стр. 336-339. IEEE, (2013)Ultra-flexible and highly transparent hydrogel-based triboelectric nanogenerator for physiological signal monitoring., , , , , , , , , и . NEMS, стр. 1903-1907. IEEE, (2021)A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers., , и . NEMS, стр. 253-256. IEEE Computer Society, (2009)A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope With 0.42°/h Bias Instability Within ±300°/s Full Scale., , , , , и . IEEE Trans. Ind. Electron., 69 (5): 5304-5313 (2022)Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit., , , , , и . Sensors, 10 (4): 3835-3856 (2010)A novel packaging stress isolation structure for SOI based MEMS gyroscopes., , , и . IEEE SENSORS, стр. 1-3. IEEE, (2016)A virtual gyroscope based-on a single-chip four-microgyroscope array., , , , и . NEMS, стр. 195-198. IEEE, (2014)Investigation of electrostatic-piezoelectric hybrid vibrational power generators with different frequency broadening schemes., , , , , , , , , и . NEMS, стр. 528-532. IEEE, (2021)An integrated reduced micromachined inertial measurement unit for land vehicle navigation., , , , и . NEMS, стр. 201-204. IEEE, (2011)One MEMS Design Tool with Maximal Six Design Flows, , , , , и . CoRR, (2008)