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Influence of an ALD TiN capping layer on the PBTI characteristics of n-FinFET with ALD HfO2/TiN-capping/TiAl gate stacks.

, , , , , , , , , , , , , , and . Sci. China Inf. Sci., 63 (2): 129403 (2020)

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A Fast DCIV Technique for Characterizing the Generation and Repassivation of Interface Traps Under DC/ AC NBTI Stress/Recovery Condition in Si p-FinFETs., , , , , , , , , and 2 other author(s). IRPS, page 1-7. IEEE, (2021)Influence of an ALD TiN capping layer on the PBTI characteristics of n-FinFET with ALD HfO2/TiN-capping/TiAl gate stacks., , , , , , , , , and 5 other author(s). Sci. China Inf. Sci., 63 (2): 129403 (2020)Investigation on Contacts Thermal Stability for 3D Sequential Integration., , , , , , , , , and 10 other author(s). IRPS, page 37-1. IEEE, (2022)Reversible and Irreversible Polarization Degradation of Hf0.5Zr0.5O2 Capacitors with Coherent Structural Transition at Elevated Temperatures., , , , , , , , , and 11 other author(s). IRPS, page 1-5. IEEE, (2024)Recent progress of hafnium oxide-based ferroelectric devices for advanced circuit applications., , , , , , , , , and . Sci. China Inf. Sci., (October 2023)Comparative Study on the Energy Profile of NBTI-Related Defects in Si and Ferroelectric p-FinFETs., , , , , , , and . IRPS, page 1-6. IEEE, (2020)Prediction of Key Metrics of Stacked Nanosheet nFETs using Genetic Algorithm-based Neural Networks., , , , and . ICTA, page 3-4. IEEE, (2022)Comparative Study on the Energy Distribution of Defects under HCD and NBTI in Short Channel p-FinFETs., , , , , , , and . IRPS, page 1-5. IEEE, (2021)