Author of the publication

Scheduling single-arm cluster tools with emergency order insertion.

, , , and . ICNSC, page 1-6. IEEE, (2022)

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

 

Other publications of authors with the same name

Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges., , , and . IEEE Trans Autom. Sci. Eng., 15 (2): 586-601 (2018)Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review., , , and . ICNSC, page 271-276. IEEE, (2015)Design Optimization of Support Structures Based on Numerical Simulation of the Temperature Fields in Selective Laser Melting., , and . ICNSC, page 1-5. IEEE, (2021)Parallel Petri Nets Modeling Method Of Manufacturing System Based On The improved PDDL., , , , and . ICNSC, page 1-6. IEEE, (2022)Noise Reduction Study of Signal Detection in Hall Sensors by Modal Analysis., , , , and . ICNSC, page 1-6. IEEE, (2022)An eM-Plant-based virtual single-arm cluster tool., and . ICNSC, page 40-45. IEEE, (2012)Scheduling of single-arm cluster tools with multi-type wafers and shared PMs., , , and . CASE, page 1046-1051. IEEE, (2017)A novel failure response policy for single-arm cluster tools with residency time constraints., , , and . SMC, page 120-126. IEEE, (2014)Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools., , , , , and . IEEE Trans Autom. Sci. Eng., 18 (4): 1653-1667 (2021)Schedulability analysis for dual-armed cluster tools with mixed-processing of multi-variety wafers., , and . ICNSC, page 501-506. IEEE, (2017)