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Fast self-resonant startup procedure for digital MEMS gyroscope system.

, , , , and . NEMS, page 669-672. IEEE, (2012)

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Fabrication and testing of a novel silicon probe for micromachined surface profilers., , , , and . NEMS, page 406-409. IEEE, (2011)A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer., , , , , , and . NEMS, page 421-425. IEEE, (2015)A temperature control system used for improving resonant frequency drift of MEMS gyroscopes., , , , , and . NEMS, page 397-400. IEEE, (2015)Residual stress characterization of GaN microstructures using bent-beam strain sensors., , , , , and . NEMS, page 138-140. IEEE, (2010)A novel acceleration switch with hat-like contact separated from proof mass., , , , , , and . NEMS, page 221-224. IEEE, (2011)Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm., , , , and . NEMS, page 1145-1148. IEEE, (2013)Research on the resonant frequency of MEMS gyroscopes under varying tuning voltage., , , , , and . NEMS, page 435-437. IEEE, (2015)Fast self-resonant startup procedure for digital MEMS gyroscope system., , , , and . NEMS, page 669-672. IEEE, (2012)An FPGA implementation of the LMS adaptive filter for MEMS gyroscope., , , , , , and . NEMS, page 744-747. IEEE, (2010)The method of prevent footing effect in making SOI micro-mechanical structure., , , and . NEMS, page 506-509. IEEE Computer Society, (2009)