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A temperature control system used for improving resonant frequency drift of MEMS gyroscopes.

, , , , , and . NEMS, page 397-400. IEEE, (2015)

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A Noncontact Fall Detection Method for Bedside Application With a MEMS Infrared Sensor and a Radar Sensor., , , , , , and . IEEE Internet Things J., 10 (14): 12577-12589 (July 2023)A capacitive readout circuit with DC sensing method for micromachined gyroscopes., , , , and . NEMS, page 712-715. IEEE, (2012)Designing of a micromachined gyroscope system with a closed-loop DC biased interface ASIC., , , , , and . Sci. China Inf. Sci., 57 (10): 1-13 (2014)Post CMOS integration of high aspect ratio SOI MEMS devices., , , , and . NEMS, page 166-169. IEEE, (2011)A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors., , and . NEMS, page 583-586. IEEE, (2012)A novel method to measure the sidewall angle of MEMS structures., , , , and . IEEE SENSORS, page 1-3. IEEE, (2017)Digital fast startup procedure for micro-machined vibratory gyroscopes using optimized fuzzy control strategy., , , , , , , and . NEMS, page 208-211. IEEE, (2014)Design and fabrication of a novel silicon probe for micromachined surface profilers., , , and . NEMS, page 941-944. IEEE, (2010)A method to reduce notching effect on the anchors of a micro-gyroscope., , , and . NEMS, page 338-341. IEEE, (2011)Improvement of transient response for drive loop of microgyroscope using 2-DOF PID controller., , , , and . NEMS, page 281-284. IEEE, (2011)