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A capacitive readout circuit with DC sensing method for micromachined gyroscopes., , , , и . NEMS, стр. 712-715. IEEE, (2012)Designing of a micromachined gyroscope system with a closed-loop DC biased interface ASIC., , , , , и . Sci. China Inf. Sci., 57 (10): 1-13 (2014)A Noncontact Fall Detection Method for Bedside Application With a MEMS Infrared Sensor and a Radar Sensor., , , , , , и . IEEE Internet Things J., 10 (14): 12577-12589 (июля 2023)Post CMOS integration of high aspect ratio SOI MEMS devices., , , , и . NEMS, стр. 166-169. IEEE, (2011)A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors., , и . NEMS, стр. 583-586. IEEE, (2012)A Low-Noise High-G Closed-Loop Capacitive Accelerometer Using DC-Blocking Technique for Reduction of Power Dissipation., , , , , и . ISCAS, стр. 1-5. IEEE, (2018)Fabrication and testing of a novel silicon probe for micromachined surface profilers., , , , и . NEMS, стр. 406-409. IEEE, (2011)A temperature control system used for improving resonant frequency drift of MEMS gyroscopes., , , , , и . NEMS, стр. 397-400. IEEE, (2015)A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer., , , , , , и . NEMS, стр. 421-425. IEEE, (2015)Residual stress characterization of GaN microstructures using bent-beam strain sensors., , , , , и . NEMS, стр. 138-140. IEEE, (2010)