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Scaled FinFETs Connected by Using Both Wafer Sides for Routing via Buried Power Rails.

, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , и . VLSI Technology and Circuits, стр. 284-285. IEEE, (2022)

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Rogér Loo

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Gottfried Loo

Dirk Loo

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