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Impact of barrier deposition process on electrical and reliability performance of Cu/CVD low k SiOCH metallization.

, , , , , , , , и . Microelectron. J., 35 (9): 693-700 (2004)

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Sivakumara Krishnamoorthy

Shivsubramani Krishnamoorthy

Vidhyasankar Krishnamoorthy

Gurumoorthy Krishnamoorthy

R. A. A. Bowler

 

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