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A Comparative Study of Deep-Learning Object Detectors for Semiconductor Defect Detection., , и . ICECS 2022, стр. 1-2. IEEE, (2022)Deep learning denoiser assisted roughness measurements extraction from thin resists with low Signal-to-Noise Ratio(SNR) SEM images: analysis with SMILE., , , , и . CoRR, (2023)Optimizing YOLOv7 for Semiconductor Defect Detection., , , и . CoRR, (2023)Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization., , , и . CoRR, (2023)In-line metrology and inspection for process control during 3D stacking of IC's., , , , , , , и . 3DIC, стр. 1-4. IEEE, (2011)An Evaluation of Continual Learning for Advanced Node Semiconductor Defect Inspection., , , и . CoRR, (2024)SEMI-PointRend: Improved Semiconductor Wafer Defect Classification and Segmentation as Rendering., , , , и . CoRR, (2023)Improved Defect Detection and Classification Method for Advanced IC Nodes by Using Slicing Aided Hyper Inference with Refinement Strategy., , , , и . CoRR, (2023)Using Unsupervised Machine Learning for Plasma Etching Endpoint Detection., , , , , и . ICPRAM, стр. 273-279. SCITEPRESS, (2020)Addressing Class Imbalance and Data Limitations in Advanced Node Semiconductor Defect Inspection: A Generative Approach for SEM Images., , , , и . CoRR, (2024)