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1.5-nm Node Surrounding Gate Transistor (SGT)-SRAM Cell with Staggered Pillar and Self-Aligned Process for Gate, Bottom Contact, and Pillar.

, , , , , , , , , , и . IMW, стр. 1-4. IEEE, (2021)

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Koji Kameo

Koji Onoda

Koji Ota

Tomoko Kojima

Hajime Kojima

 

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